All-good-point out ultraviolet lasers have been widely Utilized in the fields of mechanical flaw detection, lithography, micromachining and medicine for the advantages of small quantity, extended everyday living, high efficiency, great beam high quality, large tuning and slender spectral line, and so forth. Utilizing large electrical power close to-infrared coherent light-weight source as the elemental frequency source determined by nonlinear tuning engineering, generating ultraviolet coherent radiation by multistage frequency conversion is considered a very important solution to acquire the ultraviolet coherent mild resource.
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We summarized The existing progress status of your substantial-energy DUV laser both of those with the wavelength of FHG of your one-μm laser and at 193 nm. The modern improvement of your stable-state/fiber laser, and also the nonlinear optical crystals, prompts not simply the average electric power but additionally the beam good quality (coherence) from the DUV lasers to an unprecedented stage.
The key issue of ultraviolet coherent mild supply mostly focuses on the development of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal is amongst the problems for frequency transformation, so The expansion, sizing, destruction resistance, conversion efficiency and allowable parameter array of nonlinear optical crystal are essential Progressively more.
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On one other aspect, the power scaling from the NIR laser is yet another part to raise the common energy of your 193-nm DUV laser. Due to the deficiency of the higher-ability amplification Resolution of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) might be applied to establish a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength and obtaining relative higher electric power [21]. Lately, a diamond Raman laser showed its skill in achieving a higher electrical power and also a superior conversion performance within the 1st Stokes of the one-μm laser [22,23], which means the chance to generally be utilized from the 193-nm DUV website laser technology as a consequence of its significant Raman get and huge frequency shift.
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The heart beat duration of the 2nd Stokes mild was shortened to five ns as proven in Figure 7a, a single-shot photo in the oscilloscope, which happens to be a common phenomenon in Raman laser [forty four] while the heartbeat period from the pump laser was ten ns.
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The beam profile proven in Determine 7b shown a good beam top quality as one of several deserves of Raman laser, which might be valuable to crank out a 193-nm DUV laser with a top quality beam.
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